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    • 专利摘要:
    The present invention relates to an electro-optical phase modulator (100) for modulating the optical phase of an incident light wave (1) on the modulator, and comprising an electro-optical substrate (110) comprising an input face (111) and an output face (112), an optical waveguide (120) having a refractive index (ng) greater than the index (ns) of refraction of the substrate, which extends between one end guide input (121) on the input side and a guide output end (122) on the output side, which is adapted to guide the partially coupled incident light wave in the input guide. wave in a guided light wave (3) propagating along the optical path of the waveguide between the input end and the guide output end, and at least two modulation electrodes (131, 132) arranged in parallel to the waveguide, for, when a modulation voltage (Vm (t)) is applied between these electrodes modulation odes, introduce a modulation phase shift, a function of the modulation voltage, on the guided light wave. According to the invention, the phase modulator further comprises electrical biasing means (131, 132) of the substrate adapted to generate therein a permanent electric field capable of reducing its optical refractive index in the vicinity (117) of the guide. wave.
    公开号:FR3027414A1
    申请号:FR1459892
    申请日:2014-10-15
    公开日:2016-04-22
    发明作者:Henri Porte；Nicolas Grossard
    申请人:Photline Tech；
    IPC主号:
    专利说明:

    [0001] The present invention generally relates to the field of optical modulators for the control of light signals. It relates more particularly to an electro-optical phase modulator for modulating the optical phase of a light wave incident on the modulator.
    [0002] The invention also relates to a modulation method for such an electro-optical phase modulator. An electro-optical phase modulator is an opto-electronic device that controls the optical phase of a light wave that is incident on the modulator and passes through it, depending on an electrical signal applied thereto.
    [0003] It is known from the prior art a particular class of electro-optical phase modulators, called integrated modulators or modulators in guided optics, which comprise: an electro-optical substrate comprising an input face and an output face; an optical waveguide which extends between a guide input end located on said input face of the substrate and a guide output end located on said output face of the substrate, said optical waveguide having an optical refractive index greater than the optical refractive index of the substrate and being adapted to guide said incident light wave partially coupled into said optical waveguide into a guided light wave propagating along the optical path of said optical waveguide between said input end and said guide output end, and - at least two modulation electrodes arranged parallel to said waveguide, for, when modulation voltage is applied between said modulation electrodes, introducing a modulation phase shift, a function of said modulation voltage, on said guided light wave propagating in said optical waveguide. Thus, the polarization of the modulation electrodes with the modulation voltage makes it possible, by electro-optical effect in the substrate, to vary the optical refractive index of the waveguide in which the guided light wave is propagated, depending on the of this modulation voltage. This variation of the optical refractive index of the waveguide then introduces a phase shift, phase advance or phase delay, as a function of the sign of the modulation voltage, on the optical phase of the guided light wave passing through the guide. wave. This results in the output of the modulator by a modulation of the optical phase of the incident light wave. In theory, such an electro-optical phase modulator only modulates the optical phase of the incident light wave. Also, if a photodetector is placed on the trajectory of the emerging light wave at the output of this modulator, then the optical power (in Watt) measured by this photodetector will be constant and independent of the modulation phase shift introduced on the photodetector. the light wave guided by the modulation electrodes. In practice, however, the measured optical power is not constant and a small variation in the optical power at the output of the phase modulator is detected.
    [0004] This residual amplitude modulation or "RAM" (for "Residual Amplitude Modulation" in English) turns in some cases significant so that the performance of the phase modulator are degraded. In order to overcome the aforementioned drawback of the state of the art, the present invention proposes an electro-optical phase modulator for reducing the residual amplitude modulation at the output of this modulator. To this end, the invention relates to an electro-optical phase modulator as defined in the introduction which, according to the invention, further comprises electrical biasing means of said electro-optical substrate adapted to generate a permanent electric field in the substrate. electro-optical device capable of decreasing the optical refractive index of said electro-optical substrate in the vicinity of the waveguide. The device according to the invention thus makes it possible to reduce the coupling between the guided light wave in the optical waveguide and a light wave which propagates in an optically unguided manner in the electro-optical substrate. Indeed, at the guide entry end, during the injection of the light wave incident in the optical waveguide, part of this incident light wave is not coupled to the waveguide but is diffracted at the input face, so that a light wave radiates and then propagates in the substrate unguided out of the waveguide. This unguided light wave has a transverse spatial extension, in a plane perpendicular to the waveguide, which by diffraction increases to the exit face of the substrate. In other words, the light beam associated with the unguided light wave has an angular divergence which increases during the propagation of the light beam in the substrate, out of the waveguide. Without particular precautions, it appears that a portion of the unguided light wave can couple to the guided light wave at the guide exit end so that these two light waves interfere with each other, thereby birth to the mentioned residual amplitude modulation. Thus, by generating a permanent electric field in the electro-optical substrate 35 thanks to the electric polarization means, a region is formed close to them, in which the optical refractive index is smaller than the optical refractive index. substrate at rest.
    [0005] It will be understood here that the electric field generated by the electric polarization means is permanent in that it disappears as soon as the electric polarization means are no longer powered. In the region subjected to the electric field, in the vicinity of the waveguide, no light wave can propagate further so that the unguided light wave in the substrate is deflected away from the waveguide. The reduction of the optical refractive index of the electro-optical substrate simultaneously affects the substrate and the waveguide so that the guided light wave guidance in the waveguide is not disturbed by the permanent electric field generated. by the electric biasing means. Thanks to the deflection of the unguided light wave, it no longer overlaps with the guided light wave at the guide exit end so that the interference between the guided light wave and the wave unguided light at the output of the modulator are considerably reduced. In this way, the residual amplitude modulation is greatly attenuated. Advantageously, said electrical biasing means comprise said at least two modulation electrodes, which, when an additional bias voltage is applied between said modulation electrodes in addition to said modulation voltage, are capable of generating said permanent electric field. . Furthermore, other advantageous and non-limiting features of the electro-optical phase modulator according to the invention are the following: said electric polarization means comprise at least two additional electrodes distinct from said modulation electrodes and arranged parallel to said guide of wave between said guide input end or said guide output end and said modulation electrodes, said at least two additional electrodes being biasable by a bias voltage to generate said permanent electric field; said at least two additional electrodes being disposed between said guide input end and said modulation electrodes, said electric polarization means further comprise at least two further additional electrodes distinct from said modulation electrodes and arranged parallel to said guide electrode; wave between said guide output end and said modulation electrodes, said at least two further additional electrodes being biasable by another bias voltage to generate another permanent electric field in the electro-optical substrate adapted to decrease the optical refractive index of said electro-optical substrate in the vicinity of the waveguide; said electro-optical phase modulator further comprises means for coupling said light wave incident at the guide entry end and / or means for coupling said guided light wave to the guide exit end; said coupling means preferably comprising an optical fiber section; said electro-optical substrate is of planar geometry with two lateral faces, a lower face and an upper face, said lower and upper faces extending between said inlet face and said outlet face of the substrate and said guide; an optical wave extending in a plane parallel and close to said upper surface; said electro-optical substrate is a substrate of lithium niobate (LiNbO 3), of lithium tantalate (LiTaO 3), of polymer material, of semiconductor material, for example of silicon (Si) or of indium phosphide (InP) ), or gallium arsenide (GaAs); The difference (in absolute value) of optical refractive index induced between said waveguide and said electro-optical substrate is in a range from 10-2 to 10-3, the difference (in absolute value ) of optical refractive index induced in said electro-optical substrate by means of electrical biasing means is in the range of 10-5 to 10-6. The present invention also relates to a modulation method for an electro-optical phase modulator according to the invention. According to the invention, said modulation method comprises a step of biasing said electric polarization means adapted to generate a permanent electric field 20 capable of reducing the optical refractive index of said electro-optical substrate in the vicinity of said waveguide. The following description with reference to the accompanying drawings, given as non-limiting examples, will make it clear what the invention consists of and how it can be achieved. In the accompanying drawings: FIG. 1 represents a view from above of a first embodiment of an electro-optical phase modulator according to the invention comprising a pair of modulation electrodes and connected at the input and at the output an optical fiber; FIG. 2 is a cross-sectional view of the phase modulator of FIG. 1 along section plane A-A; FIG. 3 is a longitudinal sectional view of the phase modulator of FIG. 1 along section plane B-B; FIG. 4 represents a view from above of a second embodiment of an electro-optical phase modulator according to the invention in which the phase modulator comprises three modulation electrodes; FIG. 5 represents a view from above of a third embodiment of an electro-optical phase modulator according to the invention comprising a pair of modulation electrodes and a pair of additional electrodes arranged before the modulation electrodes; ; FIG. 6 represents a view from above of a fourth embodiment of an electro-optical phase modulator according to the invention comprising a pair of modulation electrodes and two additional pairs of electrodes arranged before and after the electrodes. modulation; FIG. 7 is a view from above of a variant of the third embodiment of the phase modulator according to the invention of FIG. 5 in which the additional electrodes are placed along a curved portion of the waveguide; FIG. 8 is a view from above of a variant of the fourth embodiment of the phase modulator according to the invention of FIG. 6 in which the two additional pairs of electrodes are placed on two curved portions of the guide of FIG. wave. FIGS. 1 to 8 show various embodiments of an electro-optical phase modulator 100, as well as some of their variants. In general, this modulator 100 is intended to modulate the optical phase 15 of an incident light wave 1 (represented here by an arrow, see FIG. 1 for example) on the modulator 100. Such a modulator 100 finds numerous applications in optical, in particular optical fiber telecommunications for data transmission, in interferometric sensors for information processing, or in the dynamic servocontrol of laser cavities. The modulator 100 firstly comprises an electro-optical substrate 110 having first-order birefringence induced by a static or variable electric field, also called the Pockels effect. This electro-optic substrate 110 is preferably formed of a lithium niobate crystal of the chemical formula LiNbO 3, which material has a large Pockels effect. The substrate 110 also has a refractive index of refraction between 2.13 and 2.25 for a wavelength range of between 400 nanometers (nm) and 1600 nm. Alternatively, the electro-optic substrate of the phase modulator may be a lithium tantalate crystal (LiTaO 3). As a further variant, this electro-optical substrate may be of polymeric material or semiconductor material, for example silicon (Si), indium phosphide (InP) or gallium arsenide (GaAs). The substrate 110 comprises, on the one hand, an input face 111 and, on the other hand, an outlet face 112. Here it has a planar geometry with two lateral faces 115, 116, a lower face 114 and a upper face 113 (see Figures 1 and 2 for example). The lower face 114 and the upper face 113 thus extend between the inlet face 111 and the outlet face 112 of the substrate 110 while being parallel to each other.
    [0006] In the same way, as shown in FIGS. 1 and 2, the inlet face 111 and the outlet face 112 are also here parallel to each other, as are the lateral faces 115, 116. The substrate 110 has the shape of a parallelepiped. Preferably, this parallelepiped is not straight and the substrate 110 is such that the inlet face 111 and one of the lateral faces (here the lateral face 116, see FIG. 1) has an angle 119 of less than 900, between 80 ° and 89.9 °, for example equal to 85 °. It will be understood in the following description the advantage of such an angle 119 to improve the performance of the phase modulator 100. The substrate 110 of the modulator here being a lithium niobate crystal, it is birefringent (intrinsic birefringence as opposed to the birefringence induced by an electric field) and it is important to specify the geometry and orientation of this substrate 110 by relation to the axes of this crystal. In the first, third and fourth embodiments of the invention shown respectively in FIGS. 1 to 3, 5 and 7, and 6 and 8, the substrate 110 is thus cut along the X axis of the LiNbO 3 crystal so that that the upper face 113 of the substrate 110 is parallel to the YZ plane of the crystal (see Figure 1). And more precisely, the Y axis of the crystal is here oriented parallel to the side faces 115, 116 of the electrooptic substrate 110. By convention, for lithium niobate, the Z axis is parallel to the C or a3 axis of the crystal mesh. The Z axis is perpendicular to the X axis of the crystal which is itself parallel to the axis al of the mesh. The Y axis is perpendicular to both the Z axis and the X axis. The Y axis is rotated 30 ° with respect to the axis a2 of the mesh, itself oriented at 120 ° of the Al axis and 90 ° axis a3. The cuts and orientations of the faces of the crystal generally refer to the X, Y and Z axes. In the second embodiment of the invention shown in FIG. 4, the substrate 110 is in turn cut along the Z axis of the LiNbO3 crystal so that the upper face 113 of the substrate 110 is parallel to the XY plane of the crystal. In this case again, the Y axis of the crystal is oriented parallel to the side faces 115, 116 of the electro-optical substrate 110. In all embodiments, the phase modulator 100 is of the integrated type and comprises an optical waveguide 120 which extends (see FIG. 1 and FIGS. 3 to 8), between: an input end 121 of a guide on the input face 111 of the substrate 110, and a guide output end 122 located on the output face 112 of the substrate 110. In the planar configuration described, the waveguide 120 extends into a parallel plane which is close to the upper surface 113 of the substrate 110.
    [0007] In particular here, as shown for example in Figures 2 and 3 for the first embodiment, the waveguide 120 is flush with the upper face 113 of the substrate 110 and has a semicircular section (see Figure 2) of radius 3 to 4 micrometers.
    [0008] This waveguide 120 may be made in the lithium niobate substrate 110 by a thermal titanium crystal diffusion process or by an annealed proton exchange method well known to those skilled in the art. In this way, an optical waveguide 120 is obtained which has an optical refraction index ng which is greater than the refractive index refractive index of the substrate. If the method of manufacturing the optical waveguide is the diffusion of titanium, the two indices of refraction, ordinary and extraordinary, increase in value. The guide made by titanium diffusion can thus support, i.e. guide, the two states of polarization. If the method of manufacturing the optical waveguide is the proton exchange, in this case only the extraordinary refractive index increases in value, while the ordinary refractive index decreases. The waveguide produced by proton exchange can thus support only one state of polarization. In order to provide light guiding, this optical refraction index ng of the waveguide 120 must be greater than the refractive index of optical refraction of the substrate 110. In general, the larger the index difference ng - index As the optical refraction between the waveguide 120 and the electro-optical substrate 110 is high, the higher the confinement of the light. Advantageously here, the negative difference in optical refractive index between the waveguide 120 and said electro-optical substrate 110 is in the range of 10-2 to 10-3. For the purpose of modulating the incident light wave 1, the optical phase modulator 100 also includes modulation means. In the first, third and fourth embodiments of the invention shown respectively in FIGS. 1 to 3, 5 and 7, and 6 and 8, where the substrate 110 is cut along the X axis, these modulation means comprise two modulation electrodes 131, 132 disposed parallel to the optical waveguide 120, here on either side thereof. In the various embodiments, these modulation electrodes 131, 132 are more precisely arranged around a rectilinear portion 123 of the waveguide 120. Furthermore, as shown in FIG. 1, the two modulation electrodes 131, 132 each comprise an inner edge 131A, 132A oriented towards the waveguide 120. They thus define between them an inter-electrode space 118 which extends from the inner edge 131A of the first modulation electrode 131 to the inner edge 132A of the second modulation electrode 132.
    [0009] The two modulation electrodes 131, 132 are spaced apart by a distance E (see FIG. 2) greater than the width of the waveguide 120 at the upper face 113 of the substrate 110 so that the modulation electrodes 131, 132 do not cover the waveguide 120. The inter-electrode distance E, delimited by the two inner edges 131A, 132A of the modulation electrodes 131, 132, corresponds to the transverse dimension, or width, of the inter-electrode space. For example, the waveguide 120 here has a width of 3 microns and the inter-electrode distance E is equal to 10 microns. In the second embodiment of the invention shown in FIG. 4, where the substrate 110 is cut along the Z axis, the modulation means comprise three modulation electrodes 131, 132, 133 arranged parallel to said waveguide. 120. The first electrode, or central electrode 133, which has a width greater than that of the waveguide 120, is located above it. The second and third electrodes, or counter-electrodes 131, 132, are located on either side of the waveguide 120, each spaced apart by a distance E 'with respect to the central electrode 133 this distance E 'being determined between the center of the lateral counter-electrodes 131, 132 and the center of the central electrode 133. For example, the waveguide 120 having here a width of 3 microns and the distance E' between the central electrode 133 and the counter electrodes 131, 132 is equal to 10 microns. Typically, the modulation electrodes 131, 132, 133 are coplanar and formed on the upper face 113 of the substrate 110 by known photolithography techniques. The dimensions (width, length, and thickness) of the modulation electrodes 131, 132, 133 are determined as a function of the modulator phase modulation stresses, the nature and geometry of the substrate 110 (dimensions and orientation), the width and length of the waveguide 120, and performance to achieve. The modulation electrodes 131, 132, 133 are intended to be polarized by a modulation voltage, noted here V, (t), the modulation voltage being a variable voltage as a function of time t. In other words, this modulation voltage V, (t) is applied between the modulation electrodes 131, 132, 133. For this, one of the modulation electrodes is brought to an electric potential equal to the voltage of modulation V, (t) (electrode 132 in the case of the first, third and fourth embodiments, see FIGS. 1, 5 and 6, for example, electrode 133 in the case of the second embodiment, see FIG. FIG. 4) while the other (the electrode 131) or the other electrodes (the electrodes 131, 132) of modulation are connected to ground. Electrical control means (not shown) are provided for applying to said modulation electrodes 131, 132, 133 the desired setpoint (amplitude, frequency, etc.) for the modulation voltage V, (t).
    [0010] In order to understand the advantages of the invention, the operation of the electro-optical phase modulator 100 will first be briefly described. The phase modulator 100 is designed to (see FIG. 3): - receive as input the incident light wave 1 for coupling it into a guided light wave 3; - modulate the optical phase of this guided light wave 3 propagating in the waveguide 120, and - coupling the guided light wave 3 into an emergent light wave 2 delivered at the output of the modulator 100, the optical phase of this emerging light wave 2 10 having a modulation identical to that of the guided light wave 3. In order to couple in input, and respectively at output, the incident light wave 1, and respectively the emergent light wave 2, the modulator 100 comprises coupling means of the incident light wave 1 at the end of guide input 121 and coupling means of the emergent light wave 2 at the outlet end 122 of the guide. These coupling means preferably comprise sections 10, 20 of optical fiber (see FIG. 3), for example a silica optical fiber, each comprising a sheath 11, 21 surrounding a cylindrical core 12, 22 in which propagates respectively the incident light wave 1 (in the core 12) and the emergent light wave 2 (in the core 22) thus each having a symmetry of revolution. FIG. 3 shows the amplitude 1A of the incident light wave 1 propagating in the core 12 of the optical fiber section 10 and the amplitude 2A of the emerging light wave 2A. propagating in the core 22 of the section 20 of optical fiber. These amplitudes 1A, 2A correspond to modes of propagation in sections 10, 20 of optical fiber which have a cylindrical symmetry. In order to effect the coupling, the optical fiber sections 10, 20 are respectively brought near the input face 111 and the output face 112 so that the core 12, 22 of each section 10, 20 of optical fiber is aligned with the guide end 121 and the guide end 122. Advantageously, it is possible to use an index glue between the optical fiber sections 10, 20 and the input and output faces 111 of the substrate 110 in order firstly to fix the said sections. 20, of optical fiber to the substrate 110, and, secondly, freeze the optical and mechanical alignment between the core 12, 22 of the fiber 10, 20 with respect to the inlet ends 121 and outlet 122 of the guide At the input, the incident lightwave 1 propagating along the core 12 of the optical fiber section 10 towards the substrate 110 is partially coupled in the optical waveguide 120 at the guide input end 121 in the form of guided light wave 3 (see arrows in FIG. 3).
    [0011] This guided light wave 3 then propagates along the optical path of the optical waveguide 120 between the input end 121 and the guide output end 122 and has an amplitude 3A as shown in FIG. because of the partial reflections of the guided light wave 3 on the input face 111 and the exit face 112, interference can be created in the waveguide 120 so that the amplitude 3A of the wave guided light 3 may have a relatively high residual amplitude modulation. Nevertheless, thanks to the angle 119 of the substrate 110, this interference phenomenon is greatly reduced so that the residual amplitude modulation due to these parasitic reflections becomes negligible. When the electrical control means apply the modulation voltage Vm (t) between the modulation electrodes 131, 132, 133, an external electric field, proportional to this modulation voltage Vm (t), is created in the vicinity of the modulation electrodes 131, 132, 133, more precisely in the region of the substrate 110 and 15 of the waveguide 120 located under the modulation electrodes 131, 132, 133. By Pockels effect, the optical refraction index ng of the waveguide is modulated by this external electric field. In known manner, the modulation of the optical refractive index is proportional to the amplitude of the external electric field, the coefficient of proportionality depending both on the nature of the material and the geometry of the modulation electrodes 131, 132, 133. In addition, depending on the orientation of the external electric field relative to the optical axes of the substrate 110, this variation in the vicinity of the modulation electrodes 131, 132, 133 can be positive or negative with respectively an increase and a decrease in optical refractive index ns, ng of the substrate 110 and the waveguide 120. During the propagation of the guided light wave 3 in the waveguide 120, this variation of the optical refractive index ng of the guide wavelength 120 introduced on the optical phase of the guided light wave 3 propagating in the optical waveguide 120, a modulation phase shift, which is a function of the amplitude of the external electric field e t therefore the amplitude of the modulation voltage Vm (t) which varies as a function of time t. As a function of the sign of the modulation voltage Vm (t), and thus of the orientation of the external electric field relative to the optical axes of the substrate 110, this modulation phase shift can be positive or negative, associated respectively with a delay or at an optical phase advance of the guided light wave 3. In this way, thanks to the modulation electrodes 131, 132, 133, the optical phase 35 of the guided light wave 3 can be modulated. Returning now to the coupling of the incident light wave 1 in the optical waveguide 120. During this coupling, because of the difference in spatial distribution of refractive index between the section 10 of optical fiber and the waveguide 120 in the substrate 110, part of the incident light wave 1 is diffracted to the input end 121 of guide, so that an unguided light wave 4 in the waveguide 120 (see Figure 3) propagates in the substrate 110. This unguided light wave 4, whose amplitude 4A 3, can interfere with the guide exit end 122 with the guided light wave 3 in the waveguide 120, thereby creating residual amplitude modulation on the emerging light wave 2 to the output of the modulator 100. In order to prevent these interferences and to limit the residual amplitude modulation, the modulator 100 according to the invention comprises means for electrically biasing the electro-optical substrate 110 to generate, in it, a permanent electric field that dim The index n, optical refraction of the substrate 110 in the vicinity of the waveguide 120. In general, these means of electrical bias comprise electrodes and electrical control means for applying between these electrodes, a voltage. In the first embodiment shown in FIGS. 1 to 3, and in its variant shown in FIG. 4, the electrical biasing means comprise the modulation electrodes 131, 132, 133 and the associated electrical control means (not shown). . When an additional bias voltage, noted hereinafter Vs, is applied between the modulation electrodes 131, 132, 133 in addition to said modulation voltage Vm (t), so that the total voltage applied is equal to Vm (t) + Vs (see FIGS. 1, 3 and 4), a permanent electric field is generated in a polarization region 117 of the substrate 110 (see FIG. 3) situated in the vicinity of the waveguide, close to and under the modulation electrodes 131, 132, 133. This polarization region 117 corresponds in practice to a region of the substrate 110 and to the guide in which the refractive indices ns, ng of the substrate 110 and of the waveguide 120 are modulated. Preferably, this additional bias voltage V is constant in time so that the permanent electric field generated in the polarization region 117 is also constant. In order to deflect the unguided light wave 4 from the waveguide 120, the additional bias voltage V is adjusted so that the permanent electric field in the substrate decreases, by Pockels effect, the index n, of optical refraction. of the electro-optical substrate 110 in the vicinity of the waveguide 120, in the polarization region 117. The unguided light wave 4 then follows the trajectory shown in dashed line in FIG. 3, a path that deviates from the region polarizer 117 of lower index than the rest of the substrate 110. In this way, the unguided light wave 4 no longer overlaps with the guided light wave 3 at the outlet end 122 of the guide, if although they can no longer interfere with each other and cause a residual amplitude modulation on the emergent light wave 2 at the output of the modulator 100. In practice, with modulation electrodes 131, 132 of length 40 millimeters, spaced from 10 LPs Means, between which a bias voltage of 5 to 10 volts is applied, reduce the residual amplitude modulation by more than 10 decibels. Advantageously, the permanent electric field generated by the electric polarization means is such that the difference in optical refractive index induced in the electro-optical substrate 110 is in the range of 10-5 to 10-6. Thanks to the electrical biasing means, the modulator 100 can implement a modulation method comprising a step of biasing these electrical biasing means. During this polarization step, the permanent electric field is generated, here by applying the additional bias voltage Vs, so as to reduce the refractive index res optical fiber of the electro-optical substrate 110 in the vicinity of the waveguide 120 This polarization step may advantageously be carried out at the same time as the modulation step of applying the modulation voltage Vm (t) to the modulation electrodes 131, 132, 133. In practice, said electrodes are applied to said electrodes. modulation 131, 132, 133 the total voltage Vm (t) + Vs so as to simultaneously modulate the guided light wave 3 in the waveguide 120 and to deflect the unguided light wave 4 to the lower face 114 of the substrate 110. Preferably, the amplitude of the additional bias voltage Vs is adjusted so that the sign, positive or negative, of the total voltage Vm (t) + Vs applied to the modulation electrodes 131, 132 be constant. For example, when the modulation voltage Vm (t) is a periodic square-wave modulation, alternately taking positive and negative values, for example +1 V and -1 V, it is possible to choose an additional voltage of polarization Vs which is constant and equal to -5 V so that the total voltage Vm (t) + Vs applied is always negative. Since the additional bias voltage Vs is constant, it is associated with an advance or an additional optical phase delay of the guided light wave 3 in the waveguide 120, which is thus either constant or retarded as a function of time. Also, the application of this additional bias voltage Vs on the modulation electrodes 131, 132 does not disturb the modulation of the optical phase of the guided light wave 3. In a second embodiment of the electro phase modulator 100 -optique shown in Figure 5, the electric polarization means of the electro-optical phase modulator 100 comprise two additional electrodes 141, 142 separate and separate modulation electrodes 131, 132, 133.
    [0012] These additional electrodes 141, 142 are arranged parallel to the waveguide 120, here between the guide input end 121 and the modulation electrodes 131, 132. The two additional electrodes 141, 142 are intended to be polarized by a polarization voltage V, applied together by means of additional electrical control means for generating a permanent electric field which decreases the optical refraction index ng of the substrate 110 in the vicinity of the waveguide 120, here in a region of the substrate located under these additional electrodes 141, 142. By placing these additional electrodes 141, 142 near the inlet end 121 of guide, it is ensured to deflect the unguided light wave 4 at the beginning of its propagation in the substrate 110. Tests have shown that with additional electrodes 141, 142 spaced at 10 micrometers and polarized with a bias voltage V equal to 5 volts, it was possible to reduce the residual amplitude modulation by at least 10 dB. Alternatively, however, the additional electrodes may be disposed between the guide output end and the modulation electrodes. In another variant, the electrical biasing means may comprise three additional electrodes arranged analogously to the modulation electrodes 131, 132, 133 of FIG. 4, these three additional electrodes being separated from the modulation electrodes. In order to limit the bias voltage V applied to the additional electrodes 141, 142, it may be provided in a third embodiment of the invention as shown in FIG. 6, that the electric polarization means furthermore comprise two other additional electrodes 151, 152 distinct from the modulation electrodes 131, 132 and arranged parallel to the waveguide 120 between the guide end 122 and the modulation electrodes 131, 132. These two further additional electrodes 151, 152 are capable of being biased by another bias voltage V ', to generate another permanent electric field in the electro-optical substrate 110, here under said two further additional electrodes 151, 152 to reduce the index n, of optical refraction of said substrate 110 in the vicinity of the waveguide 120. In this way, the unguided lightwave 4 which propagates in the substrate 110 is it is doubly deviated and remote from the guide output end 122 so that the residual amplitude modulation is further reduced. With two additional additional electrodes 151, 152 identical to the two additional electrodes 141, 142 previously described, and by applying bias voltages V, and V ', equal to 2.5 V each, the amplitude modulation is further reduced. residual.
    [0013] In variants of the second and third embodiments, respectively shown in FIGS. 7 and 8, the waveguide 120 comprises respectively a curved portion 124 and two curved portions 124, 125. In this case, the waveguide 120 which extends, in a plane parallel to the upper face 113, between the guide inlet end 121 located on the inlet face 111 of the substrate 110 and the guide outlet end 122 situated on the face output 112 of the substrate 110 is therefore non-rectilinear. In the variant of the second embodiment of the electro-optic phase modulator 100 shown in FIG. 7, the guide has a first curved guide portion 124 between the input end 121 and the guide exit end 122. so that the guided light wave 3 in the waveguide 120 propagates along the optical path thereof between the input end 121 and the guide output end 122. In this case, the two additional electrodes 141, 142 of the modulator 100, then have a shape also curved so as to be arranged parallel to the waveguide 120 at the first curved guide portion 124. Advantageously, the first curved guide portion 124 has a shape and dimensions selected to laterally offset the inter-electrode space 118 relative to the direction of propagation of the unguided light wave 4. More specifically, the first curved portion 124 of guide is such that the extension of a tangent direction 1211 to the waveguide 120 on the input face 111 deviates from the inter-electrode space 118. Otherwise formulated, it is suitable to avoid trapping of the unguided light wave 4 in the modulating zone of index 117 that the refraction plane, associated with the incident light wave 1 at the input of the waveguide 120 and containing in particular the tangent direction 1211, n ' does not intercept the inter-electrode space 118. The tangent direction 1211 to the waveguide 120 on the input face 121 corresponds conventionally to the main direction of refraction of the incident light wave 1 in the waveguide 120, or more precisely here at the projection of this main direction on one of the upper faces 113 or lower 114. In other words, this tangent direction 1211 corresponds to the main direction of propagation of the guided light wave 3 in the waveguide 120 at the input end 121 of the guide. Nevertheless, after entering the waveguide 120, the guided lightwave 3 follows the optical path of the waveguide 120 so that it arrives at the exit face 112 at the exit end 122 of guide. In the same way, the unguided light wave 4 propagates freely in the substrate 110 of the guide end 121 towards the outlet face 112 of the substrate 110, with a main propagation direction 121P (see FIG. 3) coplanar with the tangent direction 1211 in the plane of refraction.
    [0014] Thus, in the light of FIG. 7, it can be understood that, thanks to the first curved guide portion 124, the unguided light wave 4 no longer crosses the index modulation zone 117 which extends in the substrate 110 to from the inter-electrode space 118, so that the unguided light wave 4 is no longer guided in the substrate 110, under the modulation electrodes 131, 132. The unguided light wave 4 then propagates in the substrate 110 along the path shown in Figure 3 even when applying a modulation voltage Vm (t) between the electrodes 131, 132 modulation. During its propagation in the substrate 110, the unguided light wave 4 diverges and has an amplitude 4A which, by diffraction, will spread as propagation progresses, so that the unguided light wave overlaps only partially with the guided light wave 3 at the exit end 122 of the guide, so that they can no longer interfere with each other and cause residual amplitude modulation on the emerging light wave 2 at the output of the modulator 100.
    [0015] The first curved guide portion 124 then introduces a gap between the unguided light wave 4 and the inter-electrode space 118 which is greater than the spatial extension 4A of the unguided light wave, in particular at the entrance of the inter-electrode space 118. The first curved guide portion 124 here has the shape of S (see FIG. 5) with two opposite curvatures each having a radius of curvature FIc (see FIG. 5) whose value is greater than one Rcon minimum value, predetermined so that the optical losses induced by this first curved portion 124 guide are less than 0.5 dB. This minimum value R min of the radius of curvature is preferably greater than or equal to 20 mm. In order to limit the losses introduced by curvatures, it may be provided in a variant of the third embodiment (see FIG. 8) that the optical waveguide 120 has at least a second curved portion 125 of guide between the end of the waveguide. guide inlet 121 and guide outlet end 122, here after rectilinear portion 123 of the guide.
    [0016] In this way, for a fixed value of the spatial shift between the unguided light wave 4 and the index modulation zone 117, it is possible to use curved guide portions 124, 125 having smaller curvatures and introducing less losses into the modulator 100. Obviously, it is possible to use one or more curved guide portions 35 in the electro-optical phase modulator when the electrical biasing means comprise the modulation electrodes of said modulator (case of first embodiment). This has the advantage of being able to use an additional bias voltage lower than when the waveguide has no curved portion.
    权利要求:
    Claims (9)
    [0001]
    REVENDICATIONS1. An electro-optical phase modulator (100) for modulating the optical phase of an incident light wave (1) on said modulator (100), comprising: - an electro-optical substrate (110) comprising an input face ( 111) and an output face (112); an optical waveguide (120) extending between a guide input end (121) on said input face (111) of the substrate (110); ) and a guide output end (122) on said output face (112) of the substrate (110), said optical waveguide (120) having an index (ng) of optical refraction greater than the index ( ne) of optical refraction of the substrate (110) and being adapted to guide said incident light wave (1) partially coupled into said optical waveguide (120) into a guided light wave (3) propagating along the optical path of said guide optical wave (120) between said input end (121) and said guide output end (122), - at least two electrodes modulation electrodes (131, 132) disposed parallel to said waveguide (120), for, when a modulation voltage (Vm (t)) is applied between said modulation electrodes (131, 132), introducing a phase shift of modulation, a function of said modulation voltage (Vm (t)), on said guided light wave (3) propagating in said optical waveguide (120), characterized in that it comprises electrical polarization means (131) 132; 141, 142, 151, 152) of said electro-optical substrate (110) adapted to generate a permanent electric field in the electro-optical substrate (110) capable of decreasing the optical refractive index (ne) of said electro-optical substrate (110) -optic near the waveguide (120).
    [0002]
    An electro-optical phase modulator (100) according to claim 1, wherein said electrical biasing means comprises said at least two modulation electrodes (131, 132) which, when an additional bias voltage (Vs) is applied between said modulation electrodes (131, 132) in addition to said modulation voltage (Vm (t)), are capable of generating said permanent electric field.
    [0003]
    An electro-optical phase modulator (100) according to claim 1, wherein said electrical biasing means comprises at least two additional electrodes (141,142) distinct from said modulation electrodes (131,132) and arranged parallel to said waveguide guide. wave (120) between said guide input end (121) or said guide output end (122) and said modulation electrodes (131, 132), said at least two further electrodes (141, 142) being susceptible to be biased by a bias voltage (Vs) to generate said permanent electric field.
    [0004]
    An electro-optical phase modulator (100) according to claim 3, wherein, said at least two further electrodes (141, 142) being disposed between said guide input end (121) and said modulation electrodes (131). , 132), said electric biasing means further comprises at least two further additional electrodes (151, 152) distinct from said modulation electrodes (131, 132) and disposed parallel to said waveguide (120) between said output end ( 122) and said modulation electrodes (131, 132), said at least two further additional electrodes (151, 152) being biasable by another bias voltage (V'e) to generate another electric field permanent in the electro-optical substrate (110) capable of decreasing the optical refractive index (ne) of said electro-optical substrate (110) in the vicinity of the waveguide (120).
    [0005]
    Electro-optical phase modulator (100) according to one of claims 1 to 4, further comprising coupling means (10) of said incident light wave (1) at the guide end (121). and / or means for coupling (20) said guided light wave (3) to the guide output end (122), said coupling means preferably comprising an optical fiber section.
    [0006]
    Electro-optical phase modulator (100) according to one of claims 1 to 5, wherein said electro-optical substrate (110) is of planar geometry with two lateral faces (115, 116), a lower face (114 ) and an upper face (113), said lower (114) and upper (113) faces extending between said inlet face (111) and said outlet face (112) of said substrate (110) and said guide optical wave (120) extending in a plane parallel and close to said upper surface (113).
    [0007]
    Electro-optical phase modulator (100) according to one of claims 1 to 6, wherein said electro-optical substrate (110) is a substrate of lithium niobate, of lithium tantalate, of polymer material, of a material semiconductor, for example silicon, indium phosphide, or gallium arsenide.
    [0008]
    The electro-optical phase modulator (100) according to one of claims 1 to 7, wherein: - the difference in optical refractive index between said waveguide (120) and said electronic substrate (110) the optical refractive index difference induced in said electro-optical substrate (110) by means of the electrical biasing means is in a range of from 10-2 to 10-3, and 10-5 to 10-6.
    [0009]
    A modulation method for an electro-optical phase modulator (100) according to one of the preceding claims, said modulation method comprising a step of biasing said electric biasing means (131, 132, 141, 142) adapted to generating a permanent electric field capable of reducing the optical refractive index (ne) of said electro-optical substrate (110) in the vicinity of said waveguide (120).
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    同族专利:
    公开号 | 公开日
    US20160109734A1|2016-04-21|
    FR3027414B1|2017-11-10|
    EP3009879A1|2016-04-20|
    JP2016103002A|2016-06-02|
    CN105527733A|2016-04-27|
    EP3009879B1|2020-03-11|
    引用文献:
    公开号 | 申请日 | 公开日 | 申请人 | 专利标题
    JPH05173101A|1991-12-26|1993-07-13|Sony Corp|Optical controller|
    US6334004B1|1998-12-18|2001-12-25|Fujitsu Limited|Optical modulator, bias control circuit therefor, and optical transmitter including the optical modulator|
    US20140093202A1|2012-09-28|2014-04-03|Sumitomo Osaka Cement Co., Ltd.|Optical modulator|
    US4145109A|1977-05-12|1979-03-20|Sperry Rand Corporation|Electro-optic multiplexing with high interchannel isolation|
    US4359261A|1980-08-08|1982-11-16|The United States Of America As Represented By The Secretary Of The Air Force|Fiber optic switching device|
    JPH01134402A|1987-11-20|1989-05-26|Nippon Telegr & Teleph Corp <Ntt>|Light guide|
    US4984861A|1989-03-27|1991-01-15|United Technologies Corporation|Low-loss proton exchanged waveguides for active integrated optic devices and method of making same|
    JP3827629B2|2002-08-30|2006-09-27|住友大阪セメント株式会社|Light modulator|JP6075576B2|2015-03-25|2017-02-08|住友大阪セメント株式会社|Waveguide type optical device|
    WO2017213101A1|2016-06-06|2017-12-14|浜松ホトニクス株式会社|Optical element and optical device|
    JP6849676B2|2016-06-06|2021-03-24|浜松ホトニクス株式会社|Reflective spatial light modulator, light observation device and light irradiation device|
    US11106062B2|2016-06-06|2021-08-31|Hamamatsu Photonics K.K.|Light modulator, optical observation device and optical irradiation device|
    US9912413B1|2016-08-26|2018-03-06|International Business Machines Corporation|Electro-optic phase modulator with no residual amplitude modulation|
    EP3401634A1|2017-05-12|2018-11-14|Taylor Hobson Limited|Distance measuring assembly for determining the distance to an object|
    US10663660B2|2018-01-25|2020-05-26|Poet Technologies, Inc.|Optical dielectric waveguide subassembly structures|
    CN108459210B|2018-03-07|2021-01-05|西北核技术研究所|Passive pulse electric field detector without electrode structure|
    CN112910561A|2021-01-11|2021-06-04|浙江大学|Rapid capturing method of wireless laser communication system based on optical phased array|
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    优先权:
    申请号 | 申请日 | 专利标题
    FR1459892A|FR3027414B1|2014-10-15|2014-10-15|ELECTROOPTIC PHASE MODULATOR AND MODULATION METHOD|FR1459892A| FR3027414B1|2014-10-15|2014-10-15|ELECTROOPTIC PHASE MODULATOR AND MODULATION METHOD|
    US14/883,048| US20160109734A1|2014-10-15|2015-10-14|Electro-optic phase modulator and modulation method|
    JP2015202575A| JP2016103002A|2014-10-15|2015-10-14|Electro-optic phase modulator and modulation method|
    EP15306643.6A| EP3009879B1|2014-10-15|2015-10-15|Electro-optical -phase modulator and modulation method|
    CN201510859491.XA| CN105527733A|2014-10-15|2015-10-15|Electro-optic phase modulator and modulation method|
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